CEOS SEMCOR Cs/Cc corrector

CEOS SEMCOR Cs/Cc correktor

Ceos SEMCOR Cs/Cc corrector

The new CEOS SEMCOR Cs/Cc corrector is designed for aberration correction of e-beam inspection systems as CD-SEM or low voltage SEM up to 5 kV accelerating voltage. The aberration correction provides a reduction of the electron probe diameter up to a factor of 3 for most column designs. It is especially suitable for use in systems of the semiconductor industry with a strong demand of high-resolution images. These are for example metrology applications or inspection and quality control of photomasks and wafers for chip production. The corrector application is very versatile and flexible. For e-beam inspection systems the SEMCOR Cs/Cc corrector also enables an increase of beam current up to a factor of 10 for an unchanged electron probe diameter.

You can find more information about the operating principle of the CEOS Cs/Cc corrector in our White Paper: CEOS SEMCOR Cs/Cc aberration corrector for low voltage CD-SEM and its application in mask metrology.

Features

  • Corrects all aberration up to 3rd order (Cs/Cc correction).
  • Reduction of the electron probe diameter up to a factor of 3 for most column designs. Generally limited by the electron gun brightness.
  • Increase of beam current up to a factor of 10 for an unchanged electron probe diameter.
  • Applicable for e-beam inspection systems up to 5 kV acceleration voltage. For example in CD-SEM, low voltage SEM for metrology applications and industrial quality assurance.

Specifications

  • Typical reduction of electron probe diameter compared to uncorrected instruments: 3x
  • Typical increase of beam current for the same probe diameter as in uncorrected systems: 10x
  • Max. acceleration voltage: 5 kV
  • Pressure range: high vacuum (10-5 – 10-7 mbar)

Application

Metrology applications and industrial quality assurance with high resolution critical dimension scanning electron microscopes (CD-SEMs) for the semiconductor industry. Especially appropriate for feature sizes below the 7 nm and 5 nm technology node.

Product availability and reference

The CEOS SEMCOR Cs/Cc corrector is currently available in the ZX CD-SEM from HOLON Co., Ltd.

Contact

Do you have any questions about the product or the application and extension for your e-beam system? Please contact us at info@ceos-gmbh.de

EUV mask aberrations corrected and uncorrected

a) Cs/Cc corrected and b) uncorrected CD-SEM image of an EUV mask with hole pattern at 1.5 keV landing energy and 20 pA beam current. (Image taken by HOLON Co., Ltd.)

Gold particles on carbon aberrations corrected and uncorrected

a) Cs/Cc corrected and b) uncorrected CD-SEM image of gold particles on carbon film at 1.5 keV landing energy and 20 pA beam current. (Image taken by HOLON Co., Ltd.)